Semiconductors
Request QuoteGalvanized Protection
Extending the Life of Semiconductors
CTS can apply dielectric, containment/entrapment, and electrically or thermally conductive coatings to chamber components used in the manufacture of semiconductors.
The useful life of chamber components used in plasma etching processes can be extended with dielectric coatings which in-turn reduce the maintenance downtime costs.
Semiconductor Components
High-Performance Components that Elevate Your Business
Target materials that historically have been difficult to apply via thermal spray are now able to be applied with equipment designed to prevent oxidation or nitridation of coating materials during the coating application process. Nearly 100% pure silicon and silicate coatings can also be applied to components that physically contact silicon wafers. In addition, all coating materials and processes are chemically clean and used chamber components can be stripped of coating, cleaned, and re-coated thereby reducing overall maintenance costs.
This is a partial list of parts. Contact us for a quote on your specific component.
- Pedestals
- Particle containment parts
- Chucks
- Ion beam transmissions chambers
- Targets
- Valves
- Gas nozzles
- Fasteners
Our Markets
Innovative & Unique Coating Services
Every market we serve has a specific combination of products, parts, processes, and challenges.
Our technological expertise along with a thorough understanding of your industry’s complexities is critical to identifying existing and potential problems with your product or processes. We then leverage our research and collected industry data to create opportunities and custom coating solutions to improve your product’s overall performance.